Imec Presents Combined CCD-CMOS TDI Imager

Imec presents a prototype of a time-delay-integration (TDI) image sensor based on imec’s proprietary embedded CCD in CMOS technology. Imec developed and fabricated the sensor for the French Space Agency, CNES, which plans to utilize the technology for space-based earth observation. The prototypes were fabricated using imec’s 130nm process with an additional CCD process module. A charge transfer efficiency of 99.9987 % has been measured ensuring almost lossless transport of charges in the TDI array.