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| sMIM Hardware Simplified Schematic Diagram |
Chipworks publishes cross-sectional and plan-view images of the pixels of the OmniVision OV2D7AG, which is a 175 kilo-pixel, FSI global shutter, infrared CMOS sensor from the Amazon Fire Phone:
Thursday, March 03, 2016
Scanning Microwave Impedance Microscopy
Chipworks says that scanning microwave impedance microscopy (sMIM), a new scanning probe microscopy (SPM) technique, might replace traditional scanning capacitance microscopy (SCM). Like SCM, the new sMIM technique reveals information on the implanted dopant structures of a semiconductor device.
Chipworks publishes cross-sectional and plan-view images of the pixels of the OmniVision OV2D7AG, which is a 175 kilo-pixel, FSI global shutter, infrared CMOS sensor from the Amazon Fire Phone:
Chipworks publishes cross-sectional and plan-view images of the pixels of the OmniVision OV2D7AG, which is a 175 kilo-pixel, FSI global shutter, infrared CMOS sensor from the Amazon Fire Phone:
Is there any information on the detection limit/accuracy of the doping concentration available?
ReplyDeleteThis technique can measure the doping concentration from 10^14 /cm^3 – to 10^20/cm^3. More detail can be found in their website www.primenanoinc.com
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