Thesis on SPAD Integration into 28nm SOI Process

INL - Institut des Nanotechnologies de Lyon, France, publishes a PhD Thesis "Integration of Single Photon Avalanche Diodes in Fully Depleted Silicon-on-Insulator Technology" by Tulio Chaves de Albuquerque. It starts with a nice introduction into generic SPAD technology and then goes into its integration into FDSOI process.