Thanks for sharing this information Albert! I think creating a trench is not that difficult; what amazes me is how they fill it up later without creating voids. ~dexter@@
If you know how to do it, nothing is difficult ;-)
Thanks for your kind feedback, also for the many e-mails I received. Do not forget to listen to my ISSCC plenary talk coming Tuesday around 4:30 pm (CET).
Hi Albert, i watched your speech twice (on the ergometer ;-). Very interesting topic presented in a very good way - thanks a lot! Semiconductor manufacturing is a fascinating field, not just CIS. I never paid too much attention to DTI - until today. But wondered before how it was possible to make this tiny structures for example in MEMS, I think similar etching techniques you presented for DTI are also used there. The technological progress that is going on in semi production is breathtaking, in so many small details. What constantly surprises me most is that after all the complexity and all the countless complex machines and sites you need it is possible to get devices for a few dollars out of it (maybe the #1 weakness of the human brain is its poor ability to handle exponential growth and division). looking forward to watch your next speech someday!
Hi Albert, in the current issue of 'Semiconductor Digest' 3/21 (https://semiconductor-digest.com/), page 16 there is a article about MWIR metrology around etching process control. Maybe another interesting aspect around DTI fabrication
Great synthesis, thanks.
ReplyDeleteI now understand my shovel is quite old tech
(and that CIS goes more & more vertical)
Thanks for sharing this information Albert! I think creating a trench is not that difficult; what amazes me is how they fill it up later without creating voids.
ReplyDelete~dexter@@
If you know how to do it, nothing is difficult ;-)
ReplyDeleteThanks for your kind feedback, also for the many e-mails I received. Do not forget to listen to my ISSCC plenary talk coming Tuesday around 4:30 pm (CET).
Hi Albert,
ReplyDeletei watched your speech twice (on the ergometer ;-). Very interesting topic presented in a very good way - thanks a lot!
Semiconductor manufacturing is a fascinating field, not just CIS. I never paid too much attention to DTI - until today. But wondered before how it was possible to make this tiny structures for example in MEMS, I think similar etching techniques you presented for DTI are also used there. The technological progress that is going on in semi production is breathtaking, in so many small details. What constantly surprises me most is that after all the complexity and all the countless complex machines and sites you need it is possible to get devices for a few dollars out of it (maybe the #1 weakness of the human brain is its poor ability to handle exponential growth and division).
looking forward to watch your next speech someday!
Actually, the next Albert's presentation is tomorrow at ISSCC 2021 Plenary session.
DeleteHi Albert, in the current issue of 'Semiconductor Digest' 3/21 (https://semiconductor-digest.com/), page 16 there is a article about MWIR metrology around etching process control. Maybe another interesting aspect around DTI fabrication
ReplyDeleteTHANKS !
ReplyDelete