Thursday, August 06, 2020
Axcelis Ships its First 12MeV Implanter to CIS Customer for Evaluation
Axcelis reports that it has shipped first Purion XEmax evaluation system to a large image sensor customer. In a previous version of this announcement, Axcelis claimed it supports up to 15MeV energies, but now it just says "more than 12MeV."
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