PRNewswire: Axcelis announces that it has placed a Purion VXE, one of the new extended energy range models of Axcelis' high energy implanter range, at a leading chipmaker in Asia Pacific. The new system delivers the highest energy range in the Purion platform. The chipmaker plans to use the Purion VXE to support R&D for image sensors and next generation device development. The system will ship in Q1 2017.
Sometime ago, Axelis published a nice video explaining why high energy implanter is so important in modern image sensor manufacturing. Below is another video talking about Purion systems advantages for image sensor production: