Semiconductor International: ST talks about its method for optical inline monitoring of colorization effects on CMOS image sensors in its fab.
Typical defects in the manufacturing process are streaks on the color filter array. They occur after liquid processes, mainly after resist spin-coating steps. A new, automatic and fast optical inspection method for colorization effects was developed by Vistec Semiconductor Systems in collaboration with ST. The successful detection of colorization problems became possible by using an automated macro defect inspection system (Vistec LDS3200) with a combined microscope module and special optimized analysis software. The tool scans a wafer in less than 6 minutes and delivers the inspection result for the full wafer.
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