Even at design rules of 130nm used for the demonstration chip, the high-speed Schottky diodes were able to achieve THz-range performance without changing the standard CMOS processing steps.
|A one-pixel CMOS terahertz image chip (left) can see through solid objects,|
here showing the inner workings of an old-school floppy disk.
The details are presented in a paper "280GHz and 860GHz Image Sensors Using Schottky-Barrier Diodes in 0.13µm Digital CMOS," at the ISSCC this week in San Francisco.
Another similar paper at ISSCC is "A 1kPixel CMOS Camera Chip for 25fps Real-Time Terahertz Imaging Applications" by STMicro, Crolles, France, University of Wuppertal, Wuppertal, Germany and IEMN / ISEN, Lille, France