Samsung 1.7um Pixel Development

Samsung presented 1.7um pixel paper on 2006 VLSI Symposium on June 15:

"The Features and Characteristics of 5-mega CMOS Image Sensor with Topologically Unique 1.7µm x 1.7µm pixels, S.-H. Lee, C.-R. Moon, K.-H. Paik, S.-H. Hwang, J.-C. Shin, J. Jung, K. Lee, H. Noh, D. Lee, K. Kim, Samsung Electronics Co., Gyeonggi-Do, Korea

CMOS image sensor (CIS) of 5-mega pixel density has been successfully developed with the smallest pixels (1.7µm x 1.7µm) ever made. The newly introduced unique pixel architecture brought excellent optical symmetry and high electron capacity. Degradation of sensitivity and cross-talk can be suppressed with the optimization of the optical structure through proper color filter material and reduction of total aspect ratio (vertical stack height / pixel pitch) with Cu back end of line (BEOL)."