EVP of Product Development, Bill Bintz, commented, "The Purion VXE was designed to address the specific needs of customers developing and manufacturing the most advanced CMOS image sensors. To optimize both performance and yield, these emerging image sensor devices require ultra-high energy implants with extremely precise and deep implant profiles, concurrent with ultra-low metal contamination levels. Building off of Axcelis' market leading LINAC technology, the Purion VXE uniquely addresses these customer needs."
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