Monday, December 29, 2014

SSRM Pictures Image Sensor Doping

Bruker publishes a IMEC's Peter De Wolf presentation of the Scanning Surface Resistance Microscope (SSRM) useful for TCAD tools calibration, among many other things:

Posted by Vladimir Koifman at 23:09

2 comments:

  1. AnonymousDecember 30, 2014 at 5:02 PM

    it looks like the wafer used for the CMOS image sensor is P-type EPI on N-type sub, am I right?

    ReplyDelete
  2. AnonymousJanuary 2, 2015 at 1:12 AM

    it appears to be the case. however, if the n- and p-types are low doped, as in Scanning Capacitance microscopy (SCM), they may have the same color.

    ReplyDelete

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