Toshiba Review 2010 vol. 65, No 6 published the following paper:
Uncooled Infrared Radiation Image Sensor
HONDA Hiroto / FUNAKI Hideyuki
Toshiba has developed a quarter video graphics array (QVGA) (320 x 240 pixels) uncooled infrared radiation image sensor that achieves a noise equivalent temperature difference (NETD) of 0.25 K. As this sensor can detect a person in the dark from the image of the temperature distribution by sensing far-infrared radiation emitted by the skin, it is applicable to many areas including pedestrian detection sensors for automobiles, human detection sensors, security sensors, and so on.
In order to increase the resolution, or the number of pixels, we have utilized a microelectromechanical systems (MEMS)-based process to reduce the pixel pitch from 32 µm to 22 µm, which realizes a QVGA image sensor of the same sensitivity and chip size, and decrease the read-out circuit noise to improve the NETD from 0.55 K to 0.25 K.
Update: The full paper in Japanese is here.