Thursday, March 03, 2016

Scanning Microwave Impedance Microscopy

Chipworks says that scanning microwave impedance microscopy (sMIM), a new scanning probe microscopy (SPM) technique, might replace traditional scanning capacitance microscopy (SCM). Like SCM, the new sMIM technique reveals information on the implanted dopant structures of a semiconductor device.

sMIM Hardware Simplified Schematic Diagram

Chipworks publishes cross-sectional and plan-view images of the pixels of the OmniVision OV2D7AG, which is a 175 kilo-pixel, FSI global shutter, infrared CMOS sensor from the Amazon Fire Phone:


  1. Is there any information on the detection limit/accuracy of the doping concentration available?

    1. This technique can measure the doping concentration from 10^14 /cm^3 – to 10^20/cm^3. More detail can be found in their website


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