Notice that the 10 um is the isolation layer between two colour layers (as shown in the SEM cross section, but not clearly shown in the cartoon). Apparently the total thickness of the stack is at least 20 um. This makes the optical stack for the bottom layer (= red) fairly thick. But the first CMOS pixel in the early '90s were very large as well, and these days .... ?
Isn't 1/100mm kind of thick?
ReplyDeleteStill, this looks very interesting.
Not necessarily. A 12µm epi is not uncommon on sensors that are NIR sensitive.
ReplyDeleteNotice that the 10 um is the isolation layer between two colour layers (as shown in the SEM cross section, but not clearly shown in the cartoon). Apparently the total thickness of the stack is at least 20 um. This makes the optical stack for the bottom layer (= red) fairly thick. But the first CMOS pixel in the early '90s were very large as well, and these days .... ?
Delete