Axcelis Ships First 15MeV Implanter to "Leading Image Sensor Manufacturer"

PRNewswire: Axcelis announces that it has shipped the first Purion XEmax high energy system to a "leading CMOS image sensor manufacturer." The system is a new tool evaluation and has been shipped in Q2.

"The new Purion XEmax high energy implanter was designed for emerging, high performance image sensor applications," Bill Bintz, Executive Vice President, Product Development explained. "The enhanced beamline features multiple filtration systems to eliminate energetic metal contaminants which can otherwise result in compromised dark current and white pixel count levels. The new system is built on the industry leading Purion XE high energy implant platform and features Axcelis' new patented Boost Technology, which delivers beam energies up to 15 MeV. With innovative new technology, the Purion XEmax is delivering the tightest angle and overall process control to enable higher quality photodiode performance for next generation CIS devices."