PRNewswire: Axcelis has released an extended energy range option for its Purion XE high energy implanter. This new option was developed specifically to address the emerging needs of the image sensor and specialty device manufacturers. The extended energy range option is scheduled to be available on new systems in the second quarter of 2016.
Bill Bintz, EVP, marketing and engineering, said, "We're excited to be able to offer our customers the ability to perform ultra-high energy implants for next generation image sensor and power device manufacturing. These implants enable extremely precise and very deep doping profiles, for applications that include deep wells. In the case of image sensors, this allows for more effective separation of photodiodes, reduced noise and dark current, and higher quality color."
John Aldeborgh, EVP, customer operations, commented, "Image sensors and specialty devices are two of the fastest growing market segments in IC manufacturing, due to the proliferation of smartphones, tablets and digital cameras. We see significant opportunity for the Purion XE in these very active markets."
The company's Youtube video talks about the implanters for image sensors: