Monday, December 29, 2014

SSRM Pictures Image Sensor Doping

Bruker publishes a IMEC's Peter De Wolf presentation of the Scanning Surface Resistance Microscope (SSRM) useful for TCAD tools calibration, among many other things:


  1. it looks like the wafer used for the CMOS image sensor is P-type EPI on N-type sub, am I right?

  2. it appears to be the case. however, if the n- and p-types are low doped, as in Scanning Capacitance microscopy (SCM), they may have the same color.


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