Sunday, June 24, 2018

EUV Lithography Drives EUV Imaging

CNET: As Samsung endorses EUV at its 7nm process node, the new generation of photolithography is finally here, after 30 years in development:

ASML cooperates with Imec to develop 13.5nm-wavelength image sensors for its EUV machines:

1 comment:

  1. Useless promo video. Not a single shot of their EUV imager, nor what the challenges are and how it differentiates from visible CMOS sensors.


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