Sony dielectric-filled B-DTI structure from the 1.4 µm pixel featuring a 2.9 µm thick substrate extends to a depth of 1.9 µm from the back surface, although it extends to a depth of 2.4 µm deep at B-DTI intersections:
Samsung 1.12 µm pixel generation B-DTI trenches extend 1.3 µm deep into a 2.6 µm deep substrate:
Omnivision 1.0 µm pixel B-DTI extends 0.45 µm deep into the back surface of a 2.5 µm thick substrate:
Which is better, Front-DTI or Back-DTI?
ReplyDeleteDepends on where in the spectrum you want to reduce X-talk. Back-DTI is very effective in reducing blue electrical X-talk, whereas Front-DTI is effective in the green-red (and beyond) region
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