Monday, April 13, 2020

PrimeNano Pixel Analysis

PrimeNano uses pixels as a demo of capabilities of its analytical instruments:

The company also re-publishes 2015 Chipworks paper on using sMIM technique for doping analysis:

"Scanning microwave impedance microscopy (sMIM) is a new scanning probe microscopy (SPM) technique that replaces traditional scanning capacitance microscopy (SCM). Like SCM, the new sMIM technique reveals information on the implanted dopant structures of a semiconductor device. The sMIM technology provides the traditional dC/dV SCM images, which give insight into the dopant types and the positions of junction, while also providing several other channels of information, including sMIM-C and sMIM-R. The sMIM-C signal is proportional to the permittivity/capacitance variation, which, for semiconducting samples, depends on the carrier concentration, since highly doped materials will give lower capacitance for the tip-sample contact than low doped materials. The sMIM-R channel provides information about the conductivity of the sample."

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