Monday, January 10, 2022

PMD-Infineon Advances in FSI iToF Sensors

ISSCIRC 2021 paper and presentation "Advancements in Indirect Time of Flight Image Sensors in Front Side Illuminated CMOS" by M. Dielacher, M. Flatscher, R. Gabl, R. Gaggl, D. Offenberg, and J. Prima is available on-line. Few interesting slides:


  1. Nicely done! Been a while we've seen something from PMD.

  2. How are the buried mirror and the trench formed in this FSI sensor?
    Buried mirror -> Epi -> trench -> Epi?


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